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Simulations and measurements in scanning electron microscopes at low electron energy

SYSNO ASEP	0467245
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Simulations and measurements in scanning electron microscopes at low electron energy
Author(s)	Walker, C. (GB) Frank, Luděk (UPT-D)_{RID, SAI, ORCID} Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID}
Number of authors	3
Source Title	Scanning - ISSN 0161-0457 Roč. 38, č. 6 (2016), s. 802-818
Number of pages	17 s.
Publication form	Print - P
Language	eng - English
Country	US - United States
Keywords	Monte Carlo modeling ; scanned probe ; computer simulation ; electron-solid interactions ; surface analysis
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	UPT-D - RVO:68081731
UT WOS	000390267000038
EID SCOPUS	84977104035
DOI	10.1002/sca.21330
Annotation	The advent of new imaging technologies in Scanning Electron Microscopy (SEM) using low energy (0-2keV) electrons has brought about new ways to study materials at the nanoscale. It also brings new challenges in terms of understanding electron transport at these energies. In addition, reduction in energy has brought new contrast mechanisms producing images that are sometimes difficult to interpret. This is increasing the push for simulation tools, in particular for low impact energies of electrons. The use of Monte Carlo calculations to simulate the transport of electrons in materials has been undertaken by many authors for several decades. However, inaccuracies associated with the Monte Carlo technique start to grow as the energy is reduced. This is not simply associated with inaccuracies in the knowledge of the scattering cross-sections, but is fundamental to the Monte Carlo technique itself. This is because effects due to the wave nature of the electron and the energy band structure of the target above the vacuum energy level become important and these are properties which are difficult to handle using the Monte Carlo method. In this review we briefly describe the new techniques of scanning low energy electron microscopy and then outline the problems and challenges of trying to understand and quantify the signals that are obtained. The effects of charging and spin polarised measurement are also briefly explored.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2017

Number of the records: 1