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GAGG:ce single crystalline films: New perspective scintillators for electron detection in SEM
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SYSNO ASEP 0465030 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title GAGG:ce single crystalline films: New perspective scintillators for electron detection in SEM Author(s) Bok, Jan (UPT-D) RID
Lalinský, Ondřej (UPT-D) RID, ORCID, SAI
Hanuš, M. (CZ)
Onderišinová, Z. (CZ)
Kelar, J. (CZ)
Kučera, M. (CZ)Number of authors 6 Source Title Ultramicroscopy. - : Elsevier - ISSN 0304-3991
Roč. 163, APR (2016), s. 1-5Number of pages 5 s. Publication form Print - P Language eng - English Country NL - Netherlands Keywords scintillator ; GAGG:Ce ; multicomponent garnet ; epitaxial film ; electron detection ; SEM Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GA14-20012S GA ČR - Czech Science Foundation (CSF) GA16-05631S GA ČR - Czech Science Foundation (CSF) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 UT WOS 000373526100001 EID SCOPUS 84956991203 DOI 10.1016/j.ultramic.2016.01.003 Annotation Single crystal scintillators are frequently used for electron detection in scanning electron microscopy (SEM). We report gadolinium aluminum gallium garnet (GAGG:Ce) single crystalline films as a new perspective scintillators for the SEM. For the first time, the epitaxial garnet films were used in a practical application: the GAGG:Ce scintillator was incorporated into a SEM scintillation electron detector and it showed improved image quality. In order to prove the GAGG:Ce quality accurately, the scintillation properties were examined using electron beam excitation and compared with frequently used scintillators in the SEM. The results demonstrate excellent emission efficiency of the GAGG:Ce single crystalline films together with their very fast scintillation decay useful for demanding SEM applications. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2017
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