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Blaze Gratings with a Ribbed Back Slope

SYSNO ASEP	0464389
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Blaze Gratings with a Ribbed Back Slope
Author(s)	Krátký, Stanislav (UPT-D)_{RID, ORCID, SAI} Meluzín, Petr (UPT-D)_{RID, ORCID, SAI} Horáček, Miroslav (UPT-D)_{RID, ORCID, SAI} Kolařík, Vladimír (UPT-D)_{RID, ORCID, SAI} Matějka, Milan (UPT-D)_{RID, ORCID, SAI} Chlumská, Jana (UPT-D)_{RID, ORCID, SAI} Král, Stanislav (UPT-D)_{RID, SAI}
Number of authors	7
Source Title	NANOCON 2016. 8th International Conference on Nanomaterials - Research and Application. Conference Proceedings. - Ostrava : Tanger, 2017 - ISBN 978-80-87294-71-0
Pages	s. 757-761
Number of pages	5 s.
Publication form	Print - P
Action	NANOCON 2016. International Conference on Nanomaterials - Research and Application /8./
Event date	19.10.2016 - 21.10.2016
VEvent location	Brno
Country	CZ - Czech Republic
Event type	WRD
Language	eng - English
Country	CZ - Czech Republic
Keywords	nano patterning ; blazed diffraction grating ; Gaussian-type beam ; variable-shaped beam ; electron beam writer
Subject RIV	BH - Optics, Masers, Lasers
OECD category	Nano-processes (applications on nano-scale)
R&D Projects	TE01020233 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	UPT-D - RVO:68081731
UT WOS	000410656100131
Annotation	Binary relief phase-modulated gratings provide symmetrical diffraction of the incoming light beam. Asymmetrical gratings, e.g. asymmetrical triangular blazed gratings, are characteristic by an asymmetrical diffraction behavior, where one of the first diffraction orders is more important than the other one. Electron beam lithography is a suitable and flexible tool for patterning of such kind of gratings. High quality results can be readily obtained when the period of the grating is relatively large and the relief depth is relatively low, this is the case of gratings with a small blaze angle. As the blaze angle increases, the quality of result suffers from several patterning-related issues. One of the problems is a reflection of the incoming light beam from the back slope (anti-blaze facet) of the blaze grating. We propose a novel configuration, with a ribbed modulation of the back slope. This modulation is perpendicular to the direction of the grating grooves. This paper presents an analysis of the proposed blazed grating configuration. E-beam pattern generators were used to prepare a few samples of blaze gratings with a ribbed back slope. One part of the experiment was performed with a Gaussianshaped beam and another one with the variable-shaped beam. Results of the experiment are presented. Finally, we discuss the optical performance of two blaze gratings with similar parameters, one of them is with the flat back slope and another one is with the ribbed back slope.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2018

Number of the records: 1