Number of the records: 1

Modifikace materiálů pro optiku, elektroniku a spintroniku iontovým svazkem – iontová implantace pomocí urychlovačů nebo laserem indukovaného plazmatu

SYSNO ASEP	0460778
Document Type	K - Proceedings Paper (Czech conf.)
R&D Document Type	The record was not marked in the RIV
Title	Modifikace materiálů pro optiku, elektroniku a spintroniku iontovým svazkem – iontová implantace pomocí urychlovačů nebo laserem indukovaného plazmatu
Title	Ion beam modification of materials for optics, electronic and spintronics -ion implantation using accelerators or laser induced plasma ion generation
Author(s)	Macková, Anna (UJF-V)_{RID, ORCID, SAI}
Number of authors	1
Source Title	Zpravodaj ČVS, 24, 1. - Praha : Česká vakuová společnost, 2016 - ISSN 1213-2705 S. 33-43
Number of pages	10 s.
Publication form	Print - P
Action	LŠVT - Letní škola vakuové techniky 2016
Event date	30.05.2016 - 02.06.2016
VEvent location	Bořetice
Country	CZ - Czech Republic
Event type	EUR
Language	cze - Czech
Country	CZ - Czech Republic
Keywords	modification ; materials ; ion implantation
Subject RIV	BG - Nuclear, Atomic and Molecular Physics, Colliders
Institutional support	UJF-V - RVO:61389005
Annotation	Ion beam modification offers a broad field of the creating the new functional materials and nano-structures for optics, electronics, spintronics and other material branches. Using ions produced by ion accelerators or implanters means the usage of the monoenergetic beams for precise doped layer, nano-particles or cluster creation by varying the ion implantation specie versus matrix combination together with the implantation energy, ion flux etc. Recently appears the multienergetic ion implantation which is realized by using of the intense laser shot generating plasma from the specially designed targets, where the ions are accelerated and can be then implanted into the various materials. This contribution will present an overview and comparison of different ion beam modification techniques, plasma ion implantation will be also mentioned.
Workplace	Nuclear Physics Institute
Contact	Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228
Year of Publishing	2017

Number of the records: 1