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Scanning transmission microscopy at very low energies
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SYSNO ASEP 0460206 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Scanning transmission microscopy at very low energies Author(s) Müllerová, Ilona (UPT-D) RID, SAI, ORCID
Mikmeková, Eliška (UPT-D) RID
Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Frank, Luděk (UPT-D) RID, SAI, ORCIDNumber of authors 4 Source Title Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. - Brno : Institute of Scientific Instruments CAS, 2016 / Mika Filip - ISBN 978-80-87441-17-6 Pages s. 40-41 Number of pages 2 s. Publication form Print - P Action International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./ Event date 29.05.2016 - 03.06.2016 VEvent location Skalský dvůr Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords electron microscopy ; SEM Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 UT WOS 000391254000018 Annotation To operate down to units of eV with a small primary spot size, a cathode lens with a biased specimen was introduced into the SEM. The reflected signal, accelerated secondary and backscattered electrons, is collected by detectors situated above the specimen.
When we insert a detector below the specimen, the transmitted electron signal can also be used for imaging down to zero energy. Fig. 1 also shows an example of the simulated signal trajectories of electrons that impact on the detector of reflected electrons, based on an Yttrium Aluminium Garnet (YAG) crystal, and trajectories of electrons transmitted through the specimen and incident on a semiconductor detector based on the PIN structure.Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2017 Electronic address http://www.trends.isibrno.cz/
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