Number of the records: 1

Scanning transmission microscopy at very low energies

SYSNO ASEP	0460206
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Scanning transmission microscopy at very low energies
Author(s)	Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID} Mikmeková, Eliška (UPT-D)_RID Konvalina, Ivo (UPT-D)_{RID, ORCID, SAI} Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Number of authors	4
Source Title	Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. - Brno : Institute of Scientific Instruments CAS, 2016 / Mika Filip - ISBN 978-80-87441-17-6
Pages	s. 40-41
Number of pages	2 s.
Publication form	Print - P
Action	International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./
Event date	29.05.2016 - 03.06.2016
VEvent location	Skalský dvůr
Country	CZ - Czech Republic
Event type	WRD
Language	eng - English
Country	CZ - Czech Republic
Keywords	electron microscopy ; SEM
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	UPT-D - RVO:68081731
UT WOS	000391254000018
Annotation	To operate down to units of eV with a small primary spot size, a cathode lens with a biased specimen was introduced into the SEM. The reflected signal, accelerated secondary and backscattered electrons, is collected by detectors situated above the specimen. When we insert a detector below the specimen, the transmitted electron signal can also be used for imaging down to zero energy. Fig. 1 also shows an example of the simulated signal trajectories of electrons that impact on the detector of reflected electrons, based on an Yttrium Aluminium Garnet (YAG) crystal, and trajectories of electrons transmitted through the specimen and incident on a semiconductor detector based on the PIN structure.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2017
Electronic address	http://www.trends.isibrno.cz/

Number of the records: 1