Number of the records: 1

Characterisation of silicon carbide layers formed during BNCD deposition

SYSNO ASEP	0456477
Document Type	A - Abstract
R&D Document Type	The record was not marked in the RIV
R&D Document Type	Není vybrán druh dokumentu
Title	Characterisation of silicon carbide layers formed during BNCD deposition
Author(s)	Taylor, Andrew (FZU-D)_{RID, ORCID} Ashcheulov, Petr (FZU-D)_{ORCID, RID} Čada, Martin (FZU-D)_{RID, ORCID, SAI} Drahokoupil, Jan (FZU-D)_{RID, ORCID} Fekete, Ladislav (FZU-D)_{RID, ORCID} Klimša, Ladislav (FZU-D)_ORCID Olejníček, Jiří (FZU-D)_{RID, ORCID} Remeš, Zdeněk (FZU-D)_{RID, ORCID} Čtvrtlík, R. (CZ) Tomáštík, J. (CZ) Janíček, P. (CZ) Mistrík, J. (CZ) Kopeček, Jaromír (FZU-D)_{RID, ORCID} Mortet, Vincent (FZU-D)_{RID, ORCID}
Source Title	Diamond Conference. - Coventry : University of Warwick, 2015 / Newton M. P6.1-P6.3
Number of pages	3 s.
Publication form	Print - P
Action	De Beers Diamond Conference 2015
Event date	06.07.2015 - 09.07.2015
VEvent location	Warwick
Country	GB - United Kingdom
Event type	WRD
Language	eng - English
Country	GB - United Kingdom
Keywords	silicon carbide ; nano-crystalline diamond
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	GA13-31783S GA ČR - Czech Science Foundation (CSF)
	LO1409 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	LM2011029 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	FZU-D - RVO:68378271
Annotation	In this work, we further detail properties of silicon carbide (SiC) layers [1] grown by microwave plasma enhanced chemical vapour deposition with linear antenna delivery (MW-LA-PECVD) on silicon substrates using low CO2 concentrations and compare them with nano-crystalline diamond (NCD) layers grown using similar conditions. Structural, mechanical and optical properties of these layers are compared for their potential use as transparent hard coatings for optical IR windows.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2016

Number of the records: 1