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Simulation of Space Charge Effects in Electron Optical System Based on the Calculations of Current Density
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SYSNO ASEP 0451588 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve SCOPUS Title Simulation of Space Charge Effects in Electron Optical System Based on the Calculations of Current Density Author(s) Zelinka, Jiří (UPT-D) RID, SAI
Oral, Martin (UPT-D) RID, ORCID, SAI
Radlička, Tomáš (UPT-D) RID, ORCID, SAINumber of authors 3 Source Title Microscopy and Microanalysis. - : Cambridge University Press - ISSN 1431-9276
Roč. 21, S4 (2015), s. 246-251Number of pages 6 s. Publication form Print - P Language eng - English Country US - United States Keywords electron optical system ; calculations of current density Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 EID SCOPUS 84994339127 DOI 10.1017/S1431927615013458 Annotation We present a numerical method for iterative computation of electron optical systems influenced by space charge with an improved accuracy in the same calculation time. We replace the common algorithm for evaluating the space charge distribution with a new one based on the calculation of the current density distribution from an aberration polynomial. We introduce a re-meshing algorithm which adapts the mesh used for the field calculation by the finite element method in each iteration to the actual space charge distribution to keep it sufficiently fine in all areas with non-zero space charge. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2016
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