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Multitarget sputtering of piezoelectric mixed oxide thin films onto flexible substrates
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SYSNO ASEP 0450607 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Multitarget sputtering of piezoelectric mixed oxide thin films onto flexible substrates Author(s) Kleiner, A. (DE)
Suchaneck, G. (DE)
Dejneka, Alexandr (FZU-D) RID, ORCID
Jastrabík, Lubomír (FZU-D) RID, ORCID
Lavrentiev, V. (RU)
Kiselev, D.A. (RU)
Gerlach, G. (DE)Source Title Oxide Materials for Electronic Engineering - Fabrication, Properties and Application, vol. 230, Solid State Phenomena. - Pfaffikon : Scientific.Net, 2015 / Ubizskii S. ; Vasylechko L. ; Zhydachevskii Y. - ISSN 1662-9779 - ISBN 978-3-03835-428-4 Pages s. 3-7 Number of pages 5 s. Publication form Online - E Action Oxide Materials for Electronic Engineering – Fabrication, Properties and Applications (ОМЕЕ 2014) Event date 26.05.2014-30.05.2014 VEvent location Lviv Country UA - Ukraine Event type WRD Language eng - English Country CH - Switzerland Keywords complex oxide film deposition ; PZT ; multitarget reactive magnetron sputtering ; flexible polymer substrate ; XPS ; PFM Subject RIV BL - Plasma and Gas Discharge Physics Institutional support FZU-D - RVO:68378271 DOI 10.4028/www.scientific.net/SSP.230.3 Annotation Large area film deposition was performed by means of multitarget reactive magnetron sputtering from metallic targets (Pb, Ti, Zr) with a diameter of 200 mm onto Cu-coated Kapton® HN substrates. High-power pulse sputtering has been employed for the Zr-target (or alternatively for the Ti-target). Film composition profiles were evaluated by XPS and RBS. Piezoelectric properties were investigated by PFM. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2016
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