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Study of Nucleation and Early Growth of Diamond on GaN
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SYSNO ASEP 0434718 Document Type A - Abstract R&D Document Type The record was not marked in the RIV R&D Document Type Není vybrán druh dokumentu Title Study of Nucleation and Early Growth of Diamond on GaN Author(s) Ižák, Tibor (FZU-D) RID
Babchenko, Oleg (FZU-D) RID, ORCID
Potocký, Štěpán (FZU-D) RID, ORCID
Vanko, G. (SK)
Vojs, Marian (FZU-D)
Kromka, Alexander (FZU-D) RID, ORCID, SAISource Title NANOCON 2014 Conference Proceedings. - Ostrava : Tanger, 2014 - ISBN 978-80-87294-55-0 Number of pages 1 s. Action International Conference NANOCON /6./ Event date 05.11.2014-07.11.2014 VEvent location Brno Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords diamond films ; MWCVD ; GaN membranes ; c-HEMT ; heterostructures Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects GP14-16549P GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 Annotation In this study we investigate the diamond growth on GaN substrates by microwave plasma CVD. We show that using a proper gas mixture is crucial a technological factor to keep the functionality of GaN HEMT devices. Addition of CO2 and N2 to CH4/H2 gas mixture is used to minimize damaging of GaN substrate. We also found that the gas mixture control the diamond morphology from nano- to polycrystalline character. Simultaneous study focuses on the diamond growth on GaN membranes. In this case, diamond nucleation is the most limiting technological step due to low mechanical stability of GaN membranes. We observed that standard nucleation techniques (ultrasonic seeding or bias enhanced nucleation) caused cracking of the membranes or not appropriate nucleation efficiency in the Z-depth of structures. Therefore we implemented PVA polymer consisting of diamond powder as seeding composite which resulted in a successful growth of diamond thin film. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2015
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