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Active angular alignment of gauge block in system for contactless gauge block calibration
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SYSNO ASEP 0434167 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Active angular alignment of gauge block in system for contactless gauge block calibration Author(s) Buchta, Zdeněk (UPT-D) RID, SAI, ORCID
Šarbort, Martin (UPT-D) RID, ORCID, SAI
Řeřucha, Šimon (UPT-D) RID, ORCID, SAI
Hucl, Václav (UPT-D) RID, ORCID, SAI
Čížek, Martin (UPT-D) RID, ORCID, SAI
Lazar, Josef (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCIDNumber of authors 7 Source Title Optical Micro- and Nanometrology V. (Proceedings of SPIE 9132). - Bellingham : SPIE, 2014 - ISSN 0277-786X Pages 91321j:1-7 Number of pages 7 s. Publication form Online - E Action Optical Micro- and Nanometrology /5./ Event date 15.04.2014-17.04.2014 VEvent location Brussels Country BE - Belgium Event type WRD Language eng - English Country US - United States Keywords low-coherence interferometry ; gauge block ; metrology Subject RIV BH - Optics, Masers, Lasers R&D Projects TA03010663 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) GP102/09/P293 GA ČR - Czech Science Foundation (CSF) GAP102/10/1813 GA ČR - Czech Science Foundation (CSF) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 UT WOS 000345034500050 EID SCOPUS 84902360116 DOI 10.1117/12.2052901 Annotation This paper presents a method for active angular alignment of gauge block implemented in a system for automatic contactless calibration of gauge blocks designed at ISI ASCR. The system combines low-coherence interferometry and laser interferometry, where the first identifies the gauge block sides position and the second one measures the gauge block length itself. A crucial part of the system is the algorithm for gauge block alignment to the measuring beam which is able to compensate the gauge block lateral and longitudinal tilt up to 0.141 mrad. The algorithm is also important for the gauge block position monitoring during its length measurement. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2015
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