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Measurement of current density distribution in shaped e-beam writers
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SYSNO ASEP 0434105 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Measurement of current density distribution in shaped e-beam writers Author(s) Horáček, Miroslav (UPT-D) RID, ORCID, SAI
Bok, Jan (UPT-D) RID
Kolařík, Vladimír (UPT-D) RID, ORCID, SAI
Urbánek, Michal (UPT-D) RID
Matějka, Milan (UPT-D) RID, ORCID, SAI
Krátký, Stanislav (UPT-D) RID, ORCID, SAINumber of authors 6 Source Title 18th International Microscopy Congres. Proceedings. - Praha : Czechoslovak Microscopy Society, 2014 - ISBN 978-80-260-6720-7 Number of pages 2 s. Publication form Online - E Action International Microscopy Congres /18./ Event date 07.09.2014-12.09.2014 VEvent location Praha Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords e-beam writer ; current density Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) Institutional support UPT-D - RVO:68081731 Annotation The ZrO W(100) Schottky cathode is used in our e-beam writing system working with a rectangular-shaped electron beam. The homogeneous angular current density distribution is crucial for quality of exposures of the shaped beam lithography systems. Two basic types of the angular emission distribution can be observed in dependence on the microscopic final end form shape of the emitter tip, with bright centre and more common dark centre. The stable operation of the cathode thus stable end form shape requires a delicate balance of parameters inside the gun which however can slightly change during cathode life time. This implies the necessity of analysing and periodical monitoring the current density distribution in e-beam. Four methods enabling this measurement are presented. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2015
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