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Vapor pressures of (3-dimethylaminopropyl)dimethylindium, (t-butylimino)bis(diethylamino)tantalum cyclopentadienylide, and (t-butylimido)tris(ethylmethylamino)tantalum
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SYSNO ASEP 0433689 Document Type A - Abstract R&D Document Type The record was not marked in the RIV R&D Document Type Není vybrán druh dokumentu Title Vapor pressures of (3-dimethylaminopropyl)dimethylindium, (t-butylimino)bis(diethylamino)tantalum cyclopentadienylide, and (t-butylimido)tris(ethylmethylamino)tantalum Author(s) Morávek, P. (CZ)
Pangrác, Jiří (FZU-D) RID, ORCID, SAI
Fulem, M. (CZ)
Hulicius, Eduard (FZU-D) RID, ORCID, SAI
Růžička, K. (CZ)Source Title International Conference on Metalorganic Vapor Phase Epitaxy /17./. - Lausanne : École Polytechnique Fédérale de Lausanne, 2014 / Kapon E. ; Rudra A.
S. 7-7Number of pages 1 s. Action International Conference on Metalorganic Vapor Phase Epitaxy /17./ Event date 13.07.2014-18.07.2014 VEvent location Lausanne Country CH - Switzerland Event type WRD Language eng - English Country CH - Switzerland Keywords metalorganic vapor phase epitaxy ; vapor pressure ; static method ; indium precursors ; tantalum precursors Subject RIV BM - Solid Matter Physics ; Magnetism Institutional support FZU-D - RVO:68378271 Annotation Vapor pressures of three metalorganic precursors, [Me2N(CH2)3]Me2In), (t-BuN)(Et2N)2CpTa), and (t-BuN)(EtMeN)3Ta) were measured using the static method in the temperature range from 268 to 323 K. The experimental data were fitted with the Antoine equation. To our knowledge, this is the first study reporting the vapor pressure measurements for (t-BuN)(Et2N)2CpTa and (t-BuN)(EtMeN)3Ta. Fragmentary information on vapor pressure data for [Me2N(CH2)3]Me2In found in the literature are not in accordance with our measurements. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2015
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