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Differential conductometry biosensors prepared by lift-off technique by using of e-beam writer with shaped beam
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SYSNO ASEP 0429465 Document Type A - Abstract R&D Document Type The record was not marked in the RIV R&D Document Type Není vybrán druh dokumentu Title Differential conductometry biosensors prepared by lift-off technique by using of e-beam writer with shaped beam Author(s) Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Kolařík, Vladimír (UPT-D) RID, ORCID, SAI
Urbánek, Michal (UPT-D) RID
Matějka, Milan (UPT-D) RID, ORCID, SAI
Horáček, Miroslav (UPT-D) RID, ORCID, SAI
Chlumská, Jana (UPT-D) RID, ORCID, SAI
Neděla, Vilém (UPT-D) RID, ORCID, SAI
Jaffrezic-Renault, N. (FR)
Krejčí, J. (CZ)
Kučerová, R. (CZ)
Plička, R. (CZ)
Krejčí, T. (CZ)Number of authors 12 Source Title 39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. - Cambridge : University of Cambridge, 2013
S. 387Number of pages 1 s. Publication form Print - P Action MNE2013. International Conference on Micro and Nano Engineering /39./ Event date 16.09.2013-19.09.2013 VEvent location London Country GB - United Kingdom Event type WRD Language eng - English Country GB - United Kingdom Keywords differential conductometry biosensor ; electron-beam lithography ; microorganism detection Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering Institutional support UPT-D - RVO:68081731 Annotation This contribution deals with a manufacturing of differential conductometry biosensors. The active area of the sensors is made of large-area interdigitated array (IDA) gold electrodes. The IDA is prepared by e-beam writer with shaped beam. DNA sensors and microorganism detection requires appropriately designed structures with characteristic dimension up to hundreds of nm. The main goal of this contribution focuses on the IDA fabrication using electron beam lithography and additional technologies. Besides the main technology process, testing of the sensors, packaging and differential conductometry analysis is included. E-beam writer BS600 with shaped beam was used to generate desired pattern of IDA. IDA area wasThis contribution deals with a manufacturing of differential conductometry biosensors. The active area of the sensors is made of large-area interdigitated array (IDA) gold electrodes. The IDA is prepared by e-beam writer with shaped beam. DNA sensors and microorganism detection requires appropriately designed structures with characteristic dimension up to hundreds of nm. The main goal of this contribution focuses on the IDA fabrication using electron beam lithography and additional technologies. Besides the main technology process, testing of the sensors, packaging and differential conductometry analysis is included. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2015
Number of the records: 1