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Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures

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    SYSNO ASEP0429463
    Document TypeA - Abstract
    R&D Document TypeThe record was not marked in the RIV
    R&D Document TypeNení vybrán druh dokumentu
    TitleVariable shape E-beam writing: proximity effect simulation and correction of binary and relief structures
    Author(s) Urbánek, Michal (UPT-D) RID
    Matějka, Milan (UPT-D) RID, ORCID, SAI
    Kolařík, Vladimír (UPT-D) RID, ORCID, SAI
    Horáček, Miroslav (UPT-D) RID, ORCID, SAI
    Krátký, Stanislav (UPT-D) RID, ORCID, SAI
    Bok, Jan (UPT-D) RID
    Chlumská, Jana (UPT-D) RID, ORCID, SAI
    Mikšík, P. (CZ)
    Vašina, J. (CZ)
    Number of authors9
    Source Title39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. - Cambridge : University of Cambridge, 2013
    S. 582
    Number of pages1 s.
    Publication formPrint - P
    ActionMNE2013. International Conference on Micro and Nano Engineering /39./
    Event date16.09.2013-19.09.2013
    VEvent locationLondon
    CountryGB - United Kingdom
    Event typeWRD
    Languageeng - English
    CountryGB - United Kingdom
    Keywordsrectangular shaped beam ; proximity effect simulation ; binary structures and relief structures
    Subject RIVJA - Electronics ; Optoelectronics, Electrical Engineering
    Institutional supportUPT-D - RVO:68081731
    AnnotationDuring the e-beam writing, several effects occur, which can significantly change the desired resolution of designed patterns. The final pattern is mostly affected by two scattering effects in resist layer and substrate: forward scattering and backscattering. Due to this electron scattering effects, the exposed patterns can be significantly broader than the designed. This phenomenon, called proximity effect, causes that areas adjacent to the exposed ones receive nonzero electron dose and thus pattern can vary from the intended size.
    WorkplaceInstitute of Scientific Instruments
    ContactMartina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
    Year of Publishing2015
Number of the records: 1