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Reactive ion etching of polystyrene microspheres

SYSNO ASEP	0425611
Document Type	K - Proceedings Paper (Czech conf.)
R&D Document Type	Conference Paper
Title	Reactive ion etching of polystyrene microspheres
Author(s)	Domonkos, Mária (FZU-D)_RID Ižák, Tibor (FZU-D)_RID Štolcová, L. (CZ) Proška, J. (CZ) Kromka, Alexander (FZU-D)_{RID, ORCID, SAI}
Source Title	Nanomateriály a nanotechnologie ve stavebnictví 2013. - Praha : ČVUT, 2013 / Nežerka V. ; Rácová Z. ; Ryparová P. ; Tesárek P. - ISBN 978-80-01-05334-8 S. 24-28
Number of pages	5 s.
Publication form	Online - E
Action	Nanomateriály a nanotechnologie ve stavebnictví 2013
Event date	12.06.2013-12.06.2013
VEvent location	Praha
Country	CZ - Czech Republic
Event type	CST
Language	eng - English
Country	CZ - Czech Republic
Keywords	nanosphere lithography ; reactive ion etching ; polystyrene microspheres ; Langmuir-Blodgett monolayers
Subject RIV	BL - Plasma and Gas Discharge Physics
R&D Projects	GBP108/12/G108 GA ČR - Czech Science Foundation (CSF)
Institutional support	FZU-D - RVO:68378271
Annotation	This article gives a brief insight also into the principle of the nanosphere lithography and various plasma systems focusing on their properties and applicability for a subsequent topographical modification of surfaces prepared by NS lithography. In the experimental part of this study we present a successful manipulation of microspheres by reactive ion etching (RIE). A self-assembled monolayer close-packed array of monodisperse polystyrene microspheres is used as the primary template. The polystyrene microspheres (PM) were processed in capacitively coupled radiofrequency plasma (CCP) RIE system. The influence of process conditions on the PM geometry is systematically studied by scanning electron microscopy. The process conditions are controlled by varying radiofrequency power, total pressure, composition of the gas mixture (ratio O2:CF4) and process duration.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2014

Number of the records: 1