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Performances of microwave plasma generation in linear antenna configuration
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SYSNO ASEP 0424334 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Performances of microwave plasma generation in linear antenna configuration Author(s) Potocký, Štěpán (FZU-D) RID, ORCID
Rezek, Ondřej (FZU-D)
Čada, Martin (FZU-D) RID, ORCID, SAI
Babchenko, Oleg (FZU-D) RID, ORCID
Ižák, Tibor (FZU-D) RID
Varga, Marián (FZU-D) RID, ORCID
Kromka, Alexander (FZU-D) RID, ORCID, SAISource Title Perspektívne vákuové metódy a technológie (Perspective vacuum methods and technologies). - Bratislava : Slovenská vákuová spoločnosť, 2013 / Vojs M. ; Veselý M. ; Vincze A. - ISBN 978-80-971179-2-4 Pages s. 42-46 Number of pages 5 s. Publication form Print - P Action School of Vacuum Technology /16./ (Perspektívne vákuové metódy a technológie. Perspective vacuum methods and technologies) Event date 10.10.2013-13.10.2013 VEvent location Štrbské Pleso Country SK - Slovakia Event type EUR Language eng - English Country SK - Slovakia Keywords microwave plasma ; linear antena ; CVD deposition Subject RIV BL - Plasma and Gas Discharge Physics R&D Projects TA01011740 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) GAP205/12/0908 GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 Annotation The versatility of linear antenna MW plasma system for growth of carbon allotropes was previously shown. Utilization of commercially available deposition systems brings advantages of strong technological background, cost effectiveness and usually easy further up-scaling. On the other hand, these systems need special modifications and deeper understanding of ongoing processes when used for scientific research. In this article we studied the behavior of plasma generation by two independent pulsed MW generators. We have shown how to overcome a problem of missing trigger outputs from the pulsed MW generators for realization of time resolved measurements. We have also shown that in the studied system exist the 33 min period during which originally synchronized pulses detune each from other and synchronize back creating also an interval of time when plasma does not extinguish. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2014
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