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Perspectives of linear antenna microwave system for growth of various carbon nano-forms and its plasma study
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SYSNO ASEP 0422223 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Perspectives of linear antenna microwave system for growth of various carbon nano-forms and its plasma study Author(s) Potocký, Štěpán (FZU-D) RID, ORCID
Čada, Martin (FZU-D) RID, ORCID, SAI
Babchenko, Oleg (FZU-D) RID, ORCID
Ižák, Tibor (FZU-D) RID
Davydova, Marina (FZU-D) RID, ORCID
Kromka, Alexander (FZU-D) RID, ORCID, SAISource Title Physica Status Solidi B : Basic Solid State Physics. - : Wiley - ISSN 0370-1972
Roč. 250, č. 12 (2013), 2723–2726Number of pages 4 s. Language eng - English Country DE - Germany Keywords CNT ; Langmuir probe ; nanocrystalline diamond ; plasma enhanced CVD ; Raman spectroscopy ; SEM Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects TA01011740 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) GAP205/12/0908 GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 UT WOS 000328325900042 EID SCOPUS 84889086173 DOI 10.1002/pssb.201300085 Annotation The versatility of linear antenna microwave plasma system, growth of diamond films with variable grain sizes, and efficient synthesis of oriented carbon nanotubes when combined with radiofrequency substrate bias were studied. Grown diamond films and carbon nanotubes are characterized by Raman spectroscopy and scanning electron microscopy. Successful surface functionalization of carbon nanotubes without their destruction is shown in agreement to plasma state as measured by Langmuir probe. We show that diamond growth from large to ultra-small size grains can be easily driven by total gas pressure. Langmuir probe measurements indicate low electron effective energy at substrate position and higher ion energy at the lowest total gas pressure. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2014
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