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Narrowband laser-based ultrasonic technique for thin film characterization

SYSNO ASEP	0422089
Document Type	A - Abstract
R&D Document Type	The record was not marked in the RIV
R&D Document Type	Není vybrán druh dokumentu
Title	Narrowband laser-based ultrasonic technique for thin film characterization
Author(s)	Stoklasová, Pavla (UT-L)_{RID, ORCID} Landa, Michal (UT-L)_RID Sedlák, Petr (UT-L)_{RID, ORCID} Seiner, Hanuš (UT-L)_{RID, ORCID} Trnka, Jan (UT-L)_RID
Source Title	3rd International Symposium on Laser Ultrasonics and Advanced Sensing. - Japan : JSNDI, 2013 S. 44-44
Number of pages	1 s.
Publication form	Print - P
Action	LU2013
Event date	25.06.2013-28.06.2013
VEvent location	Yokohama
Country	JP - Japan
Event type	WRD
Language	eng - English
Country	JP - Japan
Keywords	laser-based ultrasonic method ; thin-layer ; spatial light modulator ; dispersion curve
Subject RIV	BI - Acoustics
R&D Projects	GPP101/12/P428 GA ČR - Czech Science Foundation (CSF)
	GA101/09/0702 GA ČR - Czech Science Foundation (CSF)
Institutional support	UT-L - RVO:61388998
Annotation	Thin-layer structures can be found in a wide range of applications such as in microelectronics, biotechnology, optics and other areas of technology. The increasing number of existing and potential applications results in an unceasing demand for measuring methods that provide us with material characterization of thin films and coatings. This knowledge is critical for the optimal fabrication of thin-films and the resulting performance of the products with integrated thin-layered components.
Workplace	Institute of Thermomechanics
Contact	Marie Kajprová, kajprova@it.cas.cz, Tel.: 266 053 154 ; Jana Lahovská, jaja@it.cas.cz, Tel.: 266 053 823
Year of Publishing	2014

Number of the records: 1