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Large area growth of functional and electronic-grade diamond thin films - today's reality
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SYSNO ASEP 0399675 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Large area growth of functional and electronic-grade diamond thin films - today's reality Author(s) Kromka, Alexander (FZU-D) RID, ORCID, SAI
Babchenko, Oleg (FZU-D) RID, ORCID
Ižák, Tibor (FZU-D) RID
Varga, Marián (FZU-D) RID, ORCID
Potocký, Štěpán (FZU-D) RID, ORCID
Rezek, Bohuslav (FZU-D) RID, ORCIDNumber of authors 6 Source Title Progresívne materiály a vákuum ( Progressive materials and vacuum). - Bratislava : Slovenská vakuová spolocnosť, 2012 / Varga M. ; Veselý M. ; Vincze A. - ISBN 978-80-971179-0-0 Pages s. 11-14 Number of pages 4 s. Publication form Print - P Action School of Vacuum Technology /15./ ( Progressive materials and vacuum) Event date 08.11.2012-11.11.2012 VEvent location Štrbské pleso Country SK - Slovakia Event type EUR Language eng - English Country SK - Slovakia Keywords diamond thin films ; large area deposition ; linear plasma ; pressure Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects GAP108/11/0794 GA ČR - Czech Science Foundation (CSF) GAP108/12/0910 GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 Annotation Diamond thin films were deposited in the linear antenna microwave plasma system. The micro- or nano-sized character of grown crystals was controlled by total gas pressure and CO2 content in the hydrogen rich gas mixture. Both these process parameters were shown as principal factors shifting the diamond growth either into re-nucleation or to crystal-enlargement mode. Thus the detailed study on total gas pressure influence onto growth kinetics and gas chemistry is presented. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2014
Number of the records: 1