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From micro- to nanocrystalline diamond films
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SYSNO ASEP 0390465 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title From micro- to nanocrystalline diamond films Author(s) Ižák, Tibor (FZU-D) RID
Babchenko, Oleg (FZU-D) RID, ORCID
Kromka, Alexander (FZU-D) RID, ORCID, SAI
Potocký, Štěpán (FZU-D) RID, ORCID
Marton, M. (SK)
Veselý, M. (SK)Source Title Proceeding of School of Vacuum Technology - Vacuum and Advanced Materials. - Bratislava : Slovenská vákuová spoločnosť, 2011 / Varga M. ; Veselý M. - ISBN 978-80-969435-9-3 Pages s. 14-19 Number of pages 6 s. Publication form Print - P Action School of Vacuum Technology - Vacuum and Advanced Materials Event date 08.09.2011-11.09.2011 VEvent location Štrbské Pleso Country SK - Slovakia Event type EUR Language eng - English Country SK - Slovakia Keywords nanocrystalline ; microcrystalline diamond ; MWCVD ; Raman ; SEM Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects MEB0810082 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) KAN400100701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) IAAX00100902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) MEB0810081 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z10100521 - FZU-D (2005-2011) Annotation In this study we compare different methods to deposit nanocrystalline diamond (NCD) films with low surface roughness required for various applications. Bias enhanced re-nucleation, argon and CO2 addition, CH4/H2 ratio variation and the influence of the pressure are mentioned. For diamond films deposition three different systems were used: (i) double bias enhanced hot filament chemical vapour deposition (HFCVD), (ii) focused microwave plasma (FMWP) and (iii) pulsed linear antenna microwave plasma (PLAMWP) system. The grain size and surface morphology of samples were evaluated from SEM (Scanning Electron Microscopy) images. The processes, which take place during the diamond deposition, are discussed in the article. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2013
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