Number of the records: 1  

From micro- to nanocrystalline diamond films

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    SYSNO ASEP0390465
    Document TypeC - Proceedings Paper (int. conf.)
    R&D Document TypeConference Paper
    TitleFrom micro- to nanocrystalline diamond films
    Author(s) Ižák, Tibor (FZU-D) RID
    Babchenko, Oleg (FZU-D) RID, ORCID
    Kromka, Alexander (FZU-D) RID, ORCID, SAI
    Potocký, Štěpán (FZU-D) RID, ORCID
    Marton, M. (SK)
    Veselý, M. (SK)
    Source TitleProceeding of School of Vacuum Technology - Vacuum and Advanced Materials. - Bratislava : Slovenská vákuová spoločnosť, 2011 / Varga M. ; Veselý M. - ISBN 978-80-969435-9-3
    Pagess. 14-19
    Number of pages6 s.
    Publication formPrint - P
    ActionSchool of Vacuum Technology - Vacuum and Advanced Materials
    Event date08.09.2011-11.09.2011
    VEvent locationŠtrbské Pleso
    CountrySK - Slovakia
    Event typeEUR
    Languageeng - English
    CountrySK - Slovakia
    Keywordsnanocrystalline ; microcrystalline diamond ; MWCVD ; Raman ; SEM
    Subject RIVBM - Solid Matter Physics ; Magnetism
    R&D ProjectsMEB0810082 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    KAN400100701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    IAAX00100902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    MEB0810081 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    CEZAV0Z10100521 - FZU-D (2005-2011)
    AnnotationIn this study we compare different methods to deposit nanocrystalline diamond (NCD) films with low surface roughness required for various applications. Bias enhanced re-nucleation, argon and CO2 addition, CH4/H2 ratio variation and the influence of the pressure are mentioned. For diamond films deposition three different systems were used: (i) double bias enhanced hot filament chemical vapour deposition (HFCVD), (ii) focused microwave plasma (FMWP) and (iii) pulsed linear antenna microwave plasma (PLAMWP) system. The grain size and surface morphology of samples were evaluated from SEM (Scanning Electron Microscopy) images. The processes, which take place during the diamond deposition, are discussed in the article.
    WorkplaceInstitute of Physics
    ContactKristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
    Year of Publishing2013
Number of the records: 1  

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