Optical study of defects in nanodiamond films grown in linear antenna microwave plasma CVD from H.sub.2./sub./CH.sub.4./sub./CO.sub.2./sub. gas mixture

Varga, Marián; Remeš, Zdeněk; Babchenko, Oleg; Kromka, Alexander

doi:https://dx.doi.org/10.1002/pssb.201200154

Number of the records: 1

Optical study of defects in nanodiamond films grown in linear antenna microwave plasma CVD from H.sub.2./sub./CH.sub.4./sub./CO.sub.2./sub. gas mixture

1.

SYSNO ASEP	0388439
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Optical study of defects in nanodiamond films grown in linear antenna microwave plasma CVD from H₂/CH₄/CO₂ gas mixture
Author(s)	Varga, Marián (FZU-D)_{RID, ORCID} Remeš, Zdeněk (FZU-D)_{RID, ORCID} Babchenko, Oleg (FZU-D)_{RID, ORCID} Kromka, Alexander (FZU-D)_{RID, ORCID, SAI}
Source Title	Physica Status Solidi B : Basic Solid State Physics. - : Wiley - ISSN 0370-1972 Roč. 249, č. 12 (2012), s. 2635-2639
Number of pages	5 s.
Language	eng - English
Country	DE - Germany
Keywords	nanocrystalline diamond ; optical spectroscopy ; wide band gap semiconductors ; pulsed linear plasma CVD
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	GAP108/11/0794 GA ČR - Czech Science Foundation (CSF)
	GAP205/12/0908 GA ČR - Czech Science Foundation (CSF)
	LH12236 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z10100521 - FZU-D (2005-2011)
UT WOS	000312215300079
DOI	10.1002/pssb.201200154
Annotation	We present the study on optical quality of nanocrystalline diamond (NCD) films with submicron grain size grown from H2/CH4/CO2 gas mixture on alkali-free borosilicate glass substrates using the commercially available large area linear antenna pulsed microwave plasma chemical vapor deposition (CVD) system. The NCD films were characterized by Raman spectroscopy, atomic force microscopy, and scanning electron microscopy. The NCD layers are optically transparent and show low optical scattering. The defect states measured by photo-thermal deflection spectroscopy (PDS) and dual beam photocurrent spectroscopy (DBPS) are dominated by the non-diamond carbon phases localized at grain boundaries with the characteristic shape of the optical absorption spectrum and the photo-ionization threshold in a near infrared region. The sp2-related defect density increases for samples grown at higher pressure. From DBPS we estimate the concentration of substitutional nitrogen to be below 10 ppm. The optimized NCD layers show the photoionization threshold in UV region above 5 eV and a broad exponential tail below 5 eV.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2013

Number of the records: 1