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Surface DBD for deposition of the PEO-like plasma polymers
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SYSNO ASEP 0376614 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Surface DBD for deposition of the PEO-like plasma polymers Author(s) Gordeev, Ivan (UFP-V)
Šimek, Milan (UFP-V) RID, ORCID
Prukner, Václav (UFP-V) RID, ORCID
Choukourov, A. (CZ)
Biederman, H. (CZ)Number of authors 5 Source Title Plasma Processes and Polymers. - : Wiley - ISSN 1612-8850
Roč. 9, č. 1 (2012), s. 83-89Number of pages 7 s. Publication form web - web Language eng - English Country DE - Germany Keywords AC barrier discharges ; surface discharges ; plasma polymers ; poly(ethylene oxide) (PEO) ; UV-vis spectroscopy Subject RIV BL - Plasma and Gas Discharge Physics R&D Projects GD104/09/H080 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20430508 - UFP-V (2005-2011) UT WOS 000298842100011 DOI 10.1002/ppap.201100051 Annotation This work investigates the possibility to prepare PEO-like plasma polymers by using an AC surface dielectric barrier discharge in argon with admixtures of di(ethylene glycol) monovinyl ether vapours at atmospheric pressure. The surface discharge was driven in an amplitude-modulated regime with a driving AC frequency of 5 kHz with a variable discharge duty cycle of 0,2-0,8. Deposition of plasma polymers was tested for variable argon flow rate of 0,5-2 slm and for various distances between the discharge electrode surface and deposition substrates. The measurements of electro-optical discharge characteristics and infrared analysis of deposited films were performed to fix suitable deposition conditions. Best retention of PEO-like character was obtained for the following conditions: the distance between substrates and discharge surface of 3 mm, argon flow rate of 1 slm, excitation AC high voltage of 2,2 kV (peak-to-peak) and discharge duty cycle of 0,4. Workplace Institute of Plasma Physics Contact Vladimíra Kebza, kebza@ipp.cas.cz, Tel.: 266 052 975 Year of Publishing 2013 Electronic address http://onlinelibrary.wiley.com/doi/10.1002/ppap.201100051/pdf
Number of the records: 1