Number of the records: 1

Influence of methane concentration on diamond film morphology and growth rate

SYSNO ASEP	0375449
Document Type	K - Proceedings Paper (Czech conf.)
R&D Document Type	The record was not marked in the RIV
Title	Influence of methane concentration on diamond film morphology and growth rate
Author(s)	Ižák, Tibor (FZU-D)_RID Babchenko, Oleg (FZU-D)_{RID, ORCID} Kromka, Alexander (FZU-D)_{RID, ORCID, SAI} Potměšil, Jiří (FZU-D) Hruška, Karel (FZU-D)_{RID, ORCID}
Source Title	Proceedings of the 2nd Winter Education Seminar. - Praha : FZÚ AV ČR, 2011 / Remeš Z. ; Kromka A. ; Ledinský M. - ISBN 978-80-260-0911-5 S. 28-32
Number of pages	5 s.
Action	Winter educational seminar /2./
Event date	16.02.2011-18.02.2011
VEvent location	Rokytnice n. J.
Country	CZ - Czech Republic
Event type	CST
Language	eng - English
Country	CZ - Czech Republic
Keywords	microcrystalline ; nanocrystalline diamond ; methane concentration ; SEM ; Raman
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	MEB0810082 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	KAN400100701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	IAAX00100902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	MEB0810081 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z10100521 - FZU-D (2005-2011)
Annotation	In this study we investigated the influence of methane concentration on the diamond film growth. The experiments were carried out in focused microwave chemical vapour deposition system. The methane concentration was varied from 0.5% to 10 % of CH4 in H2 atmosphere. The final film morphology, chemical composition and growth rate were investigated by scanning electron microscopy (SEM), Raman spectroscopy and optical reflectance measurement. We observed, that increasing of CH4 concentration enhances the growth rate, but at the expense of the diamond film quality.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2012

Number of the records: 1