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Influence of methane concentration on diamond film morphology and growth rate
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SYSNO ASEP 0375449 Document Type K - Proceedings Paper (Czech conf.) R&D Document Type The record was not marked in the RIV Title Influence of methane concentration on diamond film morphology and growth rate Author(s) Ižák, Tibor (FZU-D) RID
Babchenko, Oleg (FZU-D) RID, ORCID
Kromka, Alexander (FZU-D) RID, ORCID, SAI
Potměšil, Jiří (FZU-D)
Hruška, Karel (FZU-D) RID, ORCIDSource Title Proceedings of the 2nd Winter Education Seminar. - Praha : FZÚ AV ČR, 2011 / Remeš Z. ; Kromka A. ; Ledinský M. - ISBN 978-80-260-0911-5
S. 28-32Number of pages 5 s. Action Winter educational seminar /2./ Event date 16.02.2011-18.02.2011 VEvent location Rokytnice n. J. Country CZ - Czech Republic Event type CST Language eng - English Country CZ - Czech Republic Keywords microcrystalline ; nanocrystalline diamond ; methane concentration ; SEM ; Raman Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects MEB0810082 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) KAN400100701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) IAAX00100902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) MEB0810081 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z10100521 - FZU-D (2005-2011) Annotation In this study we investigated the influence of methane concentration on the diamond film growth. The experiments were carried out in focused microwave chemical vapour deposition system. The methane concentration was varied from 0.5% to 10 % of CH4 in H2 atmosphere. The final film morphology, chemical composition and growth rate were investigated by scanning electron microscopy (SEM), Raman spectroscopy and optical reflectance measurement. We observed, that increasing of CH4 concentration enhances the growth rate, but at the expense of the diamond film quality. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2012
Number of the records: 1