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Influence of CO.sub.2./sub. concentration on diamond film morphology in pulsed linear antenna microwave plasma CVD system

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    SYSNO ASEP0375441
    Document TypeK - Proceedings Paper (Czech. conf.)
    R&D Document TypeConference Paper
    TitleInfluence of CO2 concentration on diamond film morphology in pulsed linear antenna microwave plasma CVD system
    Author(s) Domonkos, M. (CZ)
    Ižák, Tibor (FZU-D) RID
    Babchenko, Oleg (FZU-D) RID, ORCID
    Kromka, Alexander (FZU-D) RID, ORCID, SAI
    Hruška, Karel (FZU-D) RID, ORCID
    Source TitleProceedings of the 2nd Winter Education Seminar. - Praha : FZÚ AV ČR, 2011 / Remeš Z. ; Kromka A. ; Ledinský M. - ISBN 978-80-260-0911-5
    S. 33-37
    Number of pages5 s.
    ActionWinter educational seminar /2./
    Event date16.02.2011-18.02.2011
    VEvent locationRokytnice n. J.
    CountryCZ - Czech Republic
    Event typeCST
    Languageeng - English
    CountryCZ - Czech Republic
    Keywordsnanocrystalline diamond ; large area growth ; growth rate ; CO2 addition ; SEM ; Raman Spectroscopy
    Subject RIVBM - Solid Matter Physics ; Magnetism
    R&D ProjectsMEB0810082 GA MŠk - Ministry of Education, Youth and Sports (MEYS)
    KAN400100701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    IAAX00100902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    MEB0810081 GA MŠk - Ministry of Education, Youth and Sports (MEYS)
    CEZAV0Z10100521 - FZU-D (2005-2011)
    AnnotationThe diamond films were deposited in a pulsed linear antenna microwave plasma system. The influence of CO2 addition into the standard CH4/H2 gas mixture on the diamond film morphology was investigated. The concentration of CO2 varied from 0% up to 80% in CO2/CH4/H2 gas mixture. The film morphology, the growth rate and the ratio of sp3/sp2 carbon bonds were investigated. It was found that increasing of CO2 concentration resulted in enhanced growth rate (from 20 up to 36 nm/h). However, at very high CO2 concentrations (>40%) dominates etching instead of growth process. Moreover, we found that increasing of CO2 enhances the diamond film quality.
    WorkplaceInstitute of Physics
    ContactKristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
    Year of Publishing2012
Number of the records: 1