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Very low energy scanning electron microscopy in nanotechnology

SYSNO ASEP	0375383
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Very low energy scanning electron microscopy in nanotechnology
Author(s)	Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID} Hovorka, Miloš (UPT-D) Mika, Filip (UPT-D)_{RID, SAI, ORCID} Mikmeková, Eliška (UPT-D)_RID Mikmeková, Šárka (UPT-D)_{RID, SAI, ORCID} Pokorná, Zuzana (UPT-D)_{RID, ORCID, SAI} Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Number of authors	7
Source Title	International Journal of Nanotechnology - ISSN 1475-7435 Roč. 9, 8/9 (2012), s. 695-716
Number of pages	22 s.
Language	eng - English
Country	GB - United Kingdom
Keywords	scanning electron microscopy ; very low energy electrons ; cathode lens ; grain contrast ; strain contrast ; imaging of participates ; dopant contrast ; very low energy STEM ; graphene
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	OE08012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	IAA100650902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
UT WOS	000303800500004
EID SCOPUS	84860764190
DOI	10.1504/IJNT.2012.046749
Annotation	The group of low energy electron microscopy at ISI AS CR in Brno has developed a methodology for very low energy scanning electron microscopy at high image resolution by means of an immersion electrostatic lens (the cathode lens) inserted between the illumination column of a conventional scanning electron microscope and the sample. In this way the microscope resolution can be preserved down to a landing energy of the electrons one or even fractions of an electronvolt. In the range of less than several tens of electronvolts the image signal generation processes include contrast mechanisms not met at higher energies, which respond to important features of the 3D inner potential of the target and visualise its local crystallinity as well as the electronic structure. The elecfron wavelength comparable with interatomic distances allows observation of various wave-optical phenomena in imaging.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2012

Number of the records: 1