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Mechanical properties of Al thin film measured by two different methods

SYSNO ASEP	0368997
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Ostatní články
Title	Mechanical properties of Al thin film measured by two different methods
Author(s)	Kuběna, Ivo (UFM-A)_{RID, ORCID} Kruml, Tomáš (UFM-A)_{RID, ORCID}
Number of authors	2
Source Title	Acta Metallurgica Slovaca, 1. - Košice : Hutnícka fakulta Technickej univerzity, 2010 / Longauerová M. - ISSN 1338-1156 Roč. 17, č. 3 (2011), s. 163-168
Number of pages	6 s.
Language	eng - English
Country	SK - Slovakia
Keywords	thin films ; focused ion beam ; aluminium ; nanoindentation
Subject RIV	JJ - Other Materials
CEZ	AV0Z20410507 - UFM-A (2005-2011)
Annotation	Mechanical properties of an aluminium thin film were measured by microcompression and indentation tests. The microcompression technique combines preparation of specimens using focused ion beam (FIB) and compression test by a nanoindeter device. Cylindrical specimens were prepared by focused ion beam milling. The height of cylindrical specimens was about 2 micrometers and their diameter about 1,3 micrometers. The load and displacement were continuously measured during tests. The stress-strain curves were obtained in two representations. Stresses of the first plastic bursts were determined in both representations. Hardness and Young modulus were measured by indentation test using continuous stiffness method. Representative values of thin film were calculated
Workplace	Institute of Physics of Materials
Contact	Yvonna Šrámková, sramkova@ipm.cz, Tel.: 532 290 485
Year of Publishing	2012

Number of the records: 1