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Detection of Secondary Electrons by Scintillation Detector at VP SEM

SYSNO ASEP	0368932
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Ostatní články
Title	Detection of Secondary Electrons by Scintillation Detector at VP SEM
Author(s)	Jirák, J. (CZ) Čudek, P. (CZ) Neděla, Vilém (UPT-D)_{RID, ORCID, SAI}
Number of authors	3
Source Title	Microscopy and Microanalysis. - : Cambridge University Press - ISSN 1431-9276 Roč. 17, Suppl. 2 (2011), s. 922-923
Number of pages	2 s.
Language	eng - English
Country	US - United States
Keywords	variable pressure scanning electron microscopes (VP-SEM) ; scintillation detector ; secondary electrons
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	GAP102/10/1410 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
DOI	10.1017/S1431927611005484
Annotation	For specimen observation in the scanning electron microscope operating at a higher pressure of gases in the specimen chamber (VP SEM) ionization and scintillation detectors are commonly used. The ionization detector detects a mixture of signals of secondary and backscattered electrons. Detection of predominantly secondary electrons is possible due to a special detector construction.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2012

Number of the records: 1