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Testing of a Micro Faraday Cup Array for Ion Detection in SIMS
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SYSNO ASEP 0367803 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Testing of a Micro Faraday Cup Array for Ion Detection in SIMS Author(s) Lorinčík, Jan (URE-Y)
Denton, M. B. (US)
Sperline, R. P. (US)
Young, E. T. (US)
Williams, P. (US)Number of authors 5 Source Title Analytical Letters. - : Taylor & Francis - ISSN 0003-2719
Roč. 44, č. 6 (2011), s. 1050-1057Number of pages 8 s. Language eng - English Country US - United States Keywords Faraday cup ; SIMS ; Capacitance transimpedance amplifier ; Ion detection Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects ME 894 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z20670512 - URE-Y (2005-2011) UT WOS 000289246200008 DOI 10.1080/00032719.2010.511739 Annotation A micro-Faraday array detector (row of miniature 32 thin film strip electrodes wire bonded to an on-chip integrated capacitance transimpedance amplifier) was tested for use in a multiple collector secondary ion mass spectrometry. The detector was mounted on a standard IMS3f SIMS instrument in place of a microchannel plate. The measurements were performed by using a silicon sample bombarded by either [image omitted] or Cs+ primary ions with or without D2O flooding and detecting secondary ions of Si +/-, SiH +/-, O-, SiD-, OD-. A parallel detection of near masses of 29Si and 28SiH or 18O and 16OD was demonstrated at a sensitivity level 230 counts/s. Workplace Institute of Radio Engineering and Electronics Contact Petr Vacek, vacek@ufe.cz, Tel.: 266 773 413, 266 773 438, 266 773 488 Year of Publishing 2012
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