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AFM nanometrology interferometric system with the compensation of angle errors
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SYSNO ASEP 0367516 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title AFM nanometrology interferometric system with the compensation of angle errors Author(s) Hrabina, Jan (UPT-D) RID, ORCID, SAI
Lazar, Josef (UPT-D) RID, ORCID, SAI
Klapetek, P. (CZ)
Číp, Ondřej (UPT-D) RID, SAI, ORCIDNumber of authors 4 Source Title Optical Measurement Systems for Industrial Inspection VII (Proceedings of SPIE Vol. 8082). - Bellingham : SPIE, 2011 - ISBN 978-0-8194-8678-3 Pages 80823u:1-6 Number of pages 6 s. Action Optical Measurement Systems for Industrial Inspection VII Event date 23.05.2011-26.05.2011 VEvent location Munich Country DE - Germany Event type WRD Language eng - English Country US - United States Keywords atomic force microscopy (AFM) ; nanometrology ; nanoscale ; nanopositioning ; interferometry ; abbe errors Subject RIV BH - Optics, Masers, Lasers R&D Projects LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) 2C06012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) 2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO) FT-TA3/133 GA MPO - Ministry of Industry and Trade (MPO) 2A-3TP1/113 GA MPO - Ministry of Industry and Trade (MPO) GA102/09/1276 GA ČR - Czech Science Foundation (CSF) GA102/07/1179 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000295076900133 DOI 10.1117/12.889544 Annotation The contribution is oriented towards measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. The need to make the AFM microscope a nanometrology tool not only the positioning of the tip has to be based on precise measurements but the traceability of the measuring technique has to be ensured up to the primary standard. This leads to the engagement of laser interferometric measuring methods. We present a improved design of the six-axes dimensional interferometric measurement tool for local probe microscopy stage nanopositioning with the compensation system of angle errors. The setup is powered with the help of a single-frequency frequency-doubled Nd:YAG laser which is stabilized by thermal frequency control locked to a Doppler-broadened absorption line in iodine. The laser stabilization technique is described together with comparison of frequency stability and angle errors compensation system performance. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2012
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