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Scanning transmission low-energy electron microscopy
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SYSNO ASEP 0367292 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Scanning transmission low-energy electron microscopy Author(s) Müllerová, Ilona (UPT-D) RID, SAI, ORCID
Hovorka, Miloš (UPT-D)
Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Unčovský, M. (CZ)
Frank, Luděk (UPT-D) RID, SAI, ORCIDNumber of authors 5 Source Title IBM Journal of Research and Development - ISSN 0018-8646
Roč. 55, č. 4 (2011), 2:1-6Number of pages 6 s. Language eng - English Country US - United States Keywords TEM ; STEM ; SEM Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects IAA100650902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000301500600015 EID SCOPUS 81255143912 DOI 10.1147/JRD.2011.2156190 Annotation We discuss an extension to the transmission mode of the cathode-lens-equipped scanning electron microscope, enabling operation down to the lowest energies of electrons. Penetration of electrons through free-standing ultrathin films is examined along the full energy scale, and the contribution of the secondary electrons (SEs), released near the bottom surface of the sample, is shown, enhancing the apparent transmissivity of the sample to more than 100%. Provisional filtering off of the SEs, providing the dark-field signal of forward-scattered electrons, was made using an annular 3-D adjustable detector inserted below the sample. Demonstration experiments were performed on the graphene flakes and on a 3-nm-thick carbon film. Electron penetrability at the lowest energies was measured on the graphene sample. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2012
Number of the records: 1