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Electron optical properties of a focusing magnetic/immersion-magnetic lens combined with a cathode lens

SYSNO ASEP	0367278
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Electron optical properties of a focusing magnetic/immersion-magnetic lens combined with a cathode lens
Author(s)	Konvalina, Ivo (UPT-D)_{RID, ORCID, SAI} Hovorka, Miloš (UPT-D) Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID}
Number of authors	3
Source Title	MC 2011 - Microscopy Conference Kiel. - Kiel : DGE, 2011 - ISBN 978-3-00-033910-3
Pages	im1.112:1-2
Number of pages	2 s.
Action	MC 2011 - Microscopy Conference
Event date	28.08.2011-02.09.2011
VEvent location	Kiel
Country	DE - Germany
Event type	WRD
Language	eng - English
Country	DE - Germany
Keywords	cathode lens ; aberration coefficients ; spot size
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	IAA100650902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	FR-TI1/305 GA MPO - Ministry of Industry and Trade (MPO)
	FR-TI1/118 GA MPO - Ministry of Industry and Trade (MPO)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Annotation	The cathode lens (CL) is an electron optical element used in emission electron microscopes. Special application is in the scanning low energy electron microscope (SLEEM. The CL is using first for retardation of an illuminating electron beam and then for acceleration of reflected as well as secondary electrons. The cathode lens has to be combined with a focusing magnetic lens (sequential fields) or a focusing immersion-magnetic lens (overlapped fields). These two alternatives are compared with regards to their optical properties, in particular with respect to predicted aberration coefficients (CS, CC) and the spot size, the optimum angular aperture of the primary beam, as well as maximum primary beam current for each system.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2012

Number of the records: 1