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Size-controlled formation of Cu nanoclusters in pulsed magnetron sputtering system

SYSNO ASEP	0367262
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Size-controlled formation of Cu nanoclusters in pulsed magnetron sputtering system
Author(s)	Straňák, V. (DE) Block, S. (DE) Drache, S. (DE) Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI} Helm, Ch.A. (DE) Jastrabík, Lubomír (FZU-D)_{RID, ORCID} Tichý, M. (CZ) Hippler, R. (DE)
Source Title	Surface and Coatings Technology. - : Elsevier - ISSN 0257-8972 Roč. 205, 8-9 (2011), s. 2755-2762
Number of pages	8 s.
Language	eng - English
Country	CH - Switzerland
Keywords	Cu cluster growth ; pulsed magnetron sputtering ; cluster mass- and size- distribution ; AFM
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	KJB100100805 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z10100522 - FZU-D (2005-2011)
UT WOS	000286905100009
DOI	10.1016/j.surfcoat.2010.10.030
Annotation	Size-controlled Cu clusters are formed in a system which combines pulsed magnetron sputtering and gas condensation at room temperature. The discharge repetition frequency (0.1–25 kHz) and the duty cycles (20–90%) of the magnetron sputtering are varied systematically, the influence of discharge current (100–800 mA) and the pressure in the condensation tube (25–90 Pa) is also investigated. For all preparation conditions, the cluster mass shows a lognormal distribution. A non-monotonic frequency dependence with a maximum at 1 kHz and 20% of duty cycle is observed (about 105amu, or cluster diameter 8–10 nm). By adjusting discharge frequency and duty cycle, the cluster mass can be decreased by one order of magnitude. We suggest that this effect is caused by energy dissipated into the aggregation tube; and find a critical buffer gas temperature Tg-cr which limits cluster growth.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2012

Number of the records: 1