Number of the records: 1

Characterization and optical properties of TiO.sub.2./sub. prepared by pulsed laserdeposition

SYSNO ASEP	0366495
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Characterization and optical properties of TiO₂ prepared by pulsed laserdeposition
Author(s)	Kádár, O. (HU) Uherek, F. (SK) Chlpík, J. (SK) Remsa, Jan (FZU-D)_{RID, ORCID} Bruncko, J. (SK) Vincze, A. (SK) Jelínek, Miroslav (FZU-D)_{RID, ORCID}
Source Title	ASDAM 2010-Conference Proceedings-The Eighth International Conference on Advanced Semiconductor Devices and Microsystems. - Piscataway : IEEE, 2010 / Breza J. ; Donoval D. ; Vavrinsky E. - ISBN 978-1-4244-8575-8
Pages	s. 301-304
Number of pages	4 s.
Action	International Conference on Advanced Semiconductor Devices and Microsystems /8./
Event date	25.10.2010-27.10.2010
VEvent location	Smolenice
Country	SK - Slovakia
Event type	WRD
Language	eng - English
Country	US - United States
Keywords	titanium dioxide ; pulsed laser deposition ; waveguides
Subject RIV	BM - Solid Matter Physics ; Magnetism
R&D Projects	MEB0810156 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z10100522 - FZU-D (2005-2011)
Annotation	The contribution reports on fabrication and characterization of TiO2 thin films on Si substrate. The TiO2 thin films are used for photonic devices in optical communication systems. The most important parameter for the waveguide structures is the refractive index. The crystalline TiO2 polymorphs can have different refractive index depending on the structure phase, which is technology dependent. The waveguide structures was prepared by pulsed laser deposition using 248 nm KrF laser source and targets of Ti or rutile in oxygen atmosphere. The optical characterization were done using spectroscopic ellipsometry providing the information about electron band gap values and determining the optical parameters (thickness and refractive index) of prepared TiO2 thin films. Secondary ion mass spectroscopy (SIMS) and secondary electron microscopy (SEM) was done to verify the vertical and chemical structure.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2012

Number of the records: 1