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Multidimensional interferometric tool for the local probe microscopy nanometrology

SYSNO ASEP	0366031
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Multidimensional interferometric tool for the local probe microscopy nanometrology
Author(s)	Hrabina, Jan (UPT-D)_{RID, ORCID, SAI} Lazar, Josef (UPT-D)_{RID, ORCID, SAI} Klapetek, P. (CZ) Číp, Ondřej (UPT-D)_{RID, SAI, ORCID}
Number of authors	4
Source Title	Measurement Science and Technology. - : Institute of Physics Publishing - ISSN 0957-0233 Roč. 22, č. 9 (2011), 094030:1-8
Number of pages	8 s.
Language	eng - English
Country	GB - United Kingdom
Keywords	atomic force microscopy (AFM) ; nanometrology ; nanopositioning interferometry ; nanoscale
Subject RIV	BH - Optics, Masers, Lasers
R&D Projects	LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	KAN311610701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	GA102/09/1276 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
UT WOS	000294764800031
EID SCOPUS	80051703947
DOI	10.1088/0957-0233/22/9/094030
Annotation	This work reports on the measurement at the nanoscale using local probe microscopy techniques, primarily atomic force microscopy. Recent applications using the atomic force microscope as a nanometrology tool require that not only the positioning of the tip has to be based on precise measurements but also the traceability of the measuring technique has to be ensured up to the primary standard. Thus, in our experimental work, laser interferometric measuring methods were employed. In this paper, a new design of the six-axis-dimensional interferometric measurement tool for local probe microscopy stage nanopositioning is presented.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2012

Number of the records: 1