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Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering

SYSNO ASEP	0364652
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering
Author(s)	Suchaneck, G. (DE) Labitzke, R. (DE) Adolphi, B. (DE) Jastrabík, Lubomír (FZU-D)_{RID, ORCID} Adámek, Petr (FZU-D)_{RID, ORCID} Drahokoupil, Jan (FZU-D)_{RID, ORCID} Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI} Kiselev, D.A. (PT) Kholkin, A. L. (PT) Gerlach, G. (DE) Dejneka, Alexandr (FZU-D)_{RID, ORCID}
Source Title	Surface and Coatings Technology. - : Elsevier - ISSN 0257-8972 Roč. 205, č. 2 (2011), S241-S244
Number of pages	4 s.
Language	eng - English
Country	CH - Switzerland
Keywords	pulsed DC reactive sputtering ; RF reactive sputtering ; complex oxide film deposition ; polymer substrate
Subject RIV	BH - Optics, Masers, Lasers
R&D Projects	GC202/09/J017 GA ČR - Czech Science Foundation (CSF)
	KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z10100522 - FZU-D (2005-2011)
UT WOS	000293258600051
DOI	10.1016/j.surfcoat.2011.02.050
Annotation	In this work, Pb(Zr,Ti)O3 (PZT) thin films were deposited onto flexible Cu-coated Kapton® substrates by means of reactive magnetron sputtering for the first time. Different power supplies were selected for each of the 200 mm targets to adjust film composition and substrate ion bombardment. High-power pulse sputtering has been employed for the Zr-target to enhance for formation of nanocrystals, pulsed DC sputtering for the Ti-target to provide a high enough sputter yield, and RF-sputtering for the Pb-target to prevent droplet formation.Observed piezoelectric properties demonstrate that rapid-temperature-annealed films are promising for application in flexible piezoelectric sensors, actuators and power generators.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2012

Number of the records: 1