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Evaluation of elastic properties of DLC layers using resonant ultrasound spectroscopy and AFM nanoindentation

SYSNO ASEP	0364639
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Článek ve WOS
Title	Evaluation of elastic properties of DLC layers using resonant ultrasound spectroscopy and AFM nanoindentation
Author(s)	Kocourek, Tomáš (FZU-D)_{RID, ORCID, SAI} Růžek, Michal (UT-L) Landa, Michal (UT-L)_RID Jelínek, Miroslav (FZU-D)_{RID, ORCID} Mikšovský, Jan (FZU-D)_{RID, ORCID} Kopeček, Jaromír (FZU-D)_{RID, ORCID}
Source Title	Surface and Coatings Technology. - : Elsevier - ISSN 0257-8972 Roč. 205, č. 2 (2011), S67-S70
Number of pages	4 s.
Language	eng - English
Country	CH - Switzerland
Keywords	RUS-resonant ultrasound spectroscopy ; PLD ; diamond-like carbon ; elastic properties ; AFM nanoindentation
Subject RIV	BH - Optics, Masers, Lasers
R&D Projects	GA101/09/0702 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z10100522 - FZU-D (2005-2011)
	AV0Z20760514 - UT-L (2005-2011)
UT WOS	000293258600014
DOI	10.1016/j.surfcoat.2011.01.038
Annotation	Elastic properties of diamond-like carbon (DLC) layers with gradient carbon–silicon interlayer were studied by resonant ultrasound spectroscopy (RUS) and standard nano-indentation technique. The DLC layers were prepared by pulsed laser deposition on SiC/Si substrates. The RUS method is based on modal analysis of the specimen vibration. The resonant frequency shifts caused by the layer are for the evaluation of the dynamic inplane elastic properties of the deposited DLC. The results were compared with the quasi-statical quantities - Young's modulus and hardness, obtained by nanoindentation using the AFM tip.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2012

Number of the records: 1