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Conductive gas sensors prepared using PLD

SYSNO ASEP	0363985
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Conductive gas sensors prepared using PLD
Author(s)	Jelínek, Miroslav (FZU-D)_{RID, ORCID} Myslík, V. (CZ) Vrňata, M. (CZ) Fryček, R. (CZ) Fitl, P. (CZ) Vysloužil, F. (CZ) Kocourek, Tomáš (FZU-D)_{RID, ORCID, SAI}
Source Title	Nanotechnological Basis for Advanced Sensors. - Dodrecht : Springer, 2010 / Reithmaier J.P. ; Paunovic P. ; Kulisch W. ; Popov C. ; Petkov P. - ISBN 978-94-007-0902-7
Pages	s. 390-399
Number of pages	9 s.
Action	NATO-Advanced-Study-Institute Conference on Nanotechnological Basis for Advanced Sensor
Event date	30.05.2010-11.06.2010
VEvent location	Sozopol
Country	BG - Bulgaria
Event type	WRD
Language	eng - English
Country	NL - Netherlands
Keywords	PLD ; hybrid PLD ; MAPLE ; gas sensor ; thin film sensor
Subject RIV	BM - Solid Matter Physics ; Magnetism
CEZ	AV0Z10100520 - FZU-D (2005-2011)
Annotation	This contribution deals with conductive thin film gas sensors fabricated using laser technology. The principle of pulsed laser deposition (PLD) technology is explained. The hybrid PLD systems, based on combination of PLD and magnetron, PLD and RF discharges and PLD from two laser targets, are also presented. Growing layers can be modified by ion beam. Organic films can be grown using cryogenic MAPLE technology. Nanocrystalline and testing of layer properties of gas sensors are given.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2012

Number of the records: 1