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Effect of air annealing on mechanical properties and structure of amorphous B.sub.4./sub.C films
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SYSNO ASEP 0363873 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Effect of air annealing on mechanical properties and structure of amorphous B4C films Author(s) Kulykovskyy, Valeriy (FZU-D) RID
Vorlíček, Vladimír (FZU-D) RID
Čtvrtlík, Radim (FZU-D) RID, ORCID
Boháč, Petr (FZU-D) RID, ORCID
Jastrabík, Lubomír (FZU-D) RID, ORCID
Lapšanská, H. (CZ)Source Title Surface and Coatings Technology. - : Elsevier - ISSN 0257-8972
Roč. 205, č. 16 (2011), s. 4052-4057Number of pages 6 s. Language eng - English Country CH - Switzerland Keywords amorphous B4C films ; hardness ; air annealing ; Raman spectra ; oxidation Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) 1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z10100520 - FZU-D (2005-2011) AV0Z10100522 - FZU-D (2005-2011) UT WOS 000290187700012 DOI 10.1016/j.surfcoat.2011.02.052 Annotation Amorphous B4C films were prepared by magnetron sputtering of the hot-pressed B4C target in different regimes. Hardness, intrinsic stress and film structure were investigated in dependence on the annealing temperature in air.Changes in the film structure and composition were investigated by Raman spectroscopy,confocal microscopy, and electron probe microanalysis. It has been shown that an annealing at 500 °C for 1 h leads to stress reduction, slight thickness decrease and increase of film hardness. However already at 600 °C the film oxidation proceeds very intensively with formation of the phases of boron oxide and amorphous carbon in the surface layer. The thickness of the film decreases quickly. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2012
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