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Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering
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SYSNO ASEP 0362870 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering Author(s) Vašina, P. (CZ)
Souček, P. (CZ)
Schmidtová, T. (CZ)
Eliáš, M. (CZ)
Buršíková, V. (CZ)
Jílek, M. (CZ)
Jílek Jr., M. (CZ)
Schäfer, C. (DE)
Buršík, Jiří (UFM-A) RID, ORCIDNumber of authors 9 Source Title Surface and Coatings Technology. - : Elsevier - ISSN 0257-8972
Roč. 205, Suppl. 2 (2011), S53-S56Number of pages 4 s. Language eng - English Country CH - Switzerland Keywords composite ; mechanical properties ; magnetron Subject RIV BL - Plasma and Gas Discharge Physics CEZ AV0Z20410507 - UFM-A (2005-2011) UT WOS 000293258600011 DOI 10.1016/j.surfcoat.2011.02.038 Annotation Nanocrystalline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H)shows high hardness and Young’s modulus together with low friction coefficient. In this paper, we report on the preparation of well adherent (nc-TiC/a-C:H)coatings - 5mm thick on stainless steel substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate. Hardness and Young’s modulus of this coatings are 43 Gpa and 380 Gpa, respectively. The mechanical properties – hardness and Young’s modulus – measured from the coatings top reach the values obtained at optimized experiments where the unbalanced magnetic field configuration was used. A simple method of depth profiling suitable for evaluation of mechanical properties of several micrometers thick coatings is developed and employed. The paper reports on the depth profile analyses of the coating hardness, Young’s modulus, composition and morphology. Workplace Institute of Physics of Materials Contact Yvonna Šrámková, sramkova@ipm.cz, Tel.: 532 290 485 Year of Publishing 2012
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