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Mechanical properties of ultrananocryslalline thin films deposited using dual frequency discharges
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SYSNO ASEP 0359836 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Mechanical properties of ultrananocryslalline thin films deposited using dual frequency discharges Author(s) Buršíková, V. (CZ)
Bláhová, O. (CZ)
Karásková, M. (CZ)
Zajíčková, L. (CZ)
Jašek, O. (CZ)
Franta, D. (CZ)
Klapetek, P. (CZ)
Buršík, Jiří (UFM-A) RID, ORCIDNumber of authors 8 Source Title Chemické listy. - : Česká společnost chemická - ISSN 0009-2770
Roč. 105, - (2011), s. 98-101Number of pages 4 s. Action Lokální mechanické vlastnosti ´07 Event date 07.11.2007-09.11.2007 VEvent location Brno Country CZ - Czech Republic Event type EUR Language eng - English Country CZ - Czech Republic Keywords ultrananocryslalline diamond ; plasma enhanced chemical vapor deposition ; dual frequency discharge Subject RIV BL - Plasma and Gas Discharge Physics CEZ AV0Z20410507 - UFM-A (2005-2011) UT WOS 000308670500002 Annotation The preparation of nanostructured (nanocomposite or nanocrystalline) diamond coatings is studied due to their extreme mechanical hardness and wear resistance, high bulk modulus, low compressibility, high thermal conductivity, low thermal expansion coefficient , broad optical transparency from the deep ultraviolet to the far infrared, high electrical resistivity, biocompatibility, etc. Their main advantage compared to the polycrystalline diamond film is, that they can be prepared with relatively low surface roughness. The mechanical properties such as hardness, fracture toughness, film-substrate adhesion and thermomechanical stability of the coating-substrate system play always a crucial role for industrial applications of the coatings. Therefore the main aim of the present work is to study the mechanical properties of ultrananocrystalline thin films using two different indentation techniques. Workplace Institute of Physics of Materials Contact Yvonna Šrámková, sramkova@ipm.cz, Tel.: 532 290 485 Year of Publishing 2012
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