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Correction of sample tilt in FIB instruments
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SYSNO ASEP 0358590 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Correction of sample tilt in FIB instruments Author(s) Oral, Martin (UPT-D) RID, ORCID, SAI
Lencová, Bohumila (UPT-D) RID, SAINumber of authors 2 Source Title Nuclear Instruments & Methods in Physics Research Section A. - : Elsevier - ISSN 0168-9002
Roč. 645, č. 1 (2011), s. 130-135Number of pages 6 s. Language eng - English Country NL - Netherlands Keywords sample tilt ; extraction field ; correction of elliptical beam shape ; calculation of intensity distribution ; focused ion beams Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects IAA100650805 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000292713900025 EID SCOPUS 79958187029 DOI 10.1016/j.nima.2010.12.003 Annotation Many particle optical instruments use ion beams focused onto a tilted sample and the rotationally symmetrical beam creates an elliptical spot. Furthermore, an additional electrostatic field may be present near the titled sample, an extracting field of a detector or a spectrometer or a retarding field on the sample, for example. As a result, the dipole and quadrupole components of the field near the axis of the column cause an additional astigmatic focusing of the beam, which leads to even more elongated shape of the spot. A method of determining a correction has been developed, which allows to compensate for both the ellipticity due to the tilt and the additional astigmatism and to achieve a circular spot on the titled sample. The compensation is provided by a suitable setting of two correcting quadruples and by refocusing the objective lens. The required settings of the quadrupole excitations and objective lens are obtained by a paraxial optimization. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2012
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