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Similarities and differences between spatial coherence profilometry and white-light interferometry
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SYSNO ASEP 0355851 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Similarities and differences between spatial coherence profilometry and white-light interferometry Author(s) Pavlíček, Pavel (FZU-D) RID, ORCID, SAI
Takeda, M. (JP)Source Title Similarities and Differences between Spatial Coherence Profilometry and White-light Interferometry. - Melville, New York : AIP, 2010 / Hack E. ; Rastogi P.K. - ISBN 978-0-7354-0783-1 Pages s. 161-166 Number of pages 6 s. Action International Conference on Advanced Phase Measurement Methods in Optics and Imaging Event date 16.05.2010-21.05.2010 VEvent location Ascona Country CH - Switzerland Event type WRD Language eng - English Country US - United States Keywords white-light interferometry ; spatial coherence profilometry ; shape measurement Subject RIV BH - Optics, Masers, Lasers R&D Projects KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z10100522 - FZU-D (2005-2011) UT WOS 000283749400027 Annotation Spatial coherence profilometry is a method that uses a Michelson interferometer illuminated by a quasi-monochromatic spatially extended light source to measure the shape of objects. Because of the spatially extended light source, this method takes advantage of spatial coherence of the light. Thus spatial coherence profilometry appears to be a spatial coherence analogy to white-light interferometry which is a reliable and proved method for the measurement of the shape of objects. White-light interferometry usually uses a Michelson interferometer illuminated by a polychromatic point-like light source and so is based on temporal coherence. Though these both measurement methods look similar they show some significant differences. By means of theoretical analysis and experiments we investigate what is similar and where are the differences between these both methods. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2011
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