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Control of tin oxide film morphology by addition of hydrocarbons to the chemical vapour deposition process
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SYSNO ASEP 0355506 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Control of tin oxide film morphology by addition of hydrocarbons to the chemical vapour deposition process Author(s) Yates, H.M. (GB)
Evans, P. (GB)
Sheel, D.W. (GB)
Remeš, Zdeněk (FZU-D) RID, ORCID
Vaněček, Milan (FZU-D) RIDNumber of authors 5 Source Title Thin Solid Films. - : Elsevier - ISSN 0040-6090
Roč. 519, č. 4 (2010), s. 1334-1340Number of pages 7 s. Language eng - English Country CH - Switzerland Keywords alcohol ; chemical vapour deposition ; morphology ; tin oxide Subject RIV BM - Solid Matter Physics ; Magnetism CEZ AV0Z10100521 - FZU-D (2005-2011) UT WOS 000285125300012 DOI 10.1016/j.tsf.2010.09.037 Annotation In this paper we have shown that it is possible to modify and control the surface morphology of doped SnO2 transparent conducting oxide thin films deposited by atmospheric pressure chemical vapour deposition by use of additives during the deposition process. A range of volatile organic compounds were explored, which caused changes of differing magnitude to the growth rates, crystallographic preferences, size and shape of the surface features and optical transmittance. Of the additives tested methanol and tertiary butanol were found to have the most significant influence allowing the surface to be modified from small, round features to much more elongated, sharp, pyramidal features. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2011
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