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Investigation of the mechanical properties of thin films by bulge test
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SYSNO ASEP 0353858 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Investigation of the mechanical properties of thin films by bulge test Author(s) Hémel, A. (FR)
Jacques, A. (FR)
Schenk, T. (FR)
Kruml, Tomáš (UFM-A) RID, ORCIDNumber of authors 4 Source Title Solid State Phenomena - ISSN 1012-0394
156-158, - (2010), s. 477-482Number of pages 6 s. Action GADEST 2009 Event date 26.09.2009-2.10.2009 VEvent location Berlin Country DE - Germany Event type WRD Language eng - English Country CH - Switzerland Keywords thin films ; mechanical properties ; bulge test Subject RIV JJ - Other Materials CEZ AV0Z20410507 - UFM-A (2005-2011) Annotation A new bulge test device has been built, with the aim to perform mechanical tests on membranes with a thickness in the 100 nm to 10 µm range, between room temperature and 900°C. The first tests on Si3N4 and gold films give results consistent with literature data. Workplace Institute of Physics of Materials Contact Yvonna Šrámková, sramkova@ipm.cz, Tel.: 532 290 485 Year of Publishing 2011
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