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Accurate and Easy-to-use Electron Optical Design Program for Microscopy
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SYSNO ASEP 0353047 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Accurate and Easy-to-use Electron Optical Design Program for Microscopy Author(s) Zlámal, J. (CZ)
Lencová, Bohumila (UPT-D) RID, SAISource Title Proceedings of the 17th IFSM International Microscopy Congress. - Rio de Janeiro : Sociedade Brasileira de Microscopia e Microanilise, 2010 - ISBN 978-85-63273-06-2 Pages i1.6:1-2 Number of pages 2 s. Action International Microscopy Congress (IMC17) /17./ Event date 19.09.2010-24.09.2010 VEvent location Rio de Janeiro Country BR - Brazil Event type WRD Language eng - English Country BR - Brazil Keywords EOD ; FEM ; Windows Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects IAA100650805 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z20650511 - UPT-D (2005-2011) Annotation Finite Element Method (FEM) has become the universal method for computing 2D potentials in rotationally symmetric electrostatic and saturated magnetic lenses, electrostatic multipoles and magnetic deflection coils inside lenses. For all these elements optimum methods for computing the first order FEM equations were derived, fast solution algorithms implemented and an option for accuracy evaluation of lens field added. Determination of the optical properties is complemented with high accuracy ray tracing which allows extracting the aberration coefficients of up to the 5th order from the ray-traced results. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2011
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