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Detection of Secondary Electrons by Scintillation Detector in Variable Pressure Scanning Electron Microscopes
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SYSNO ASEP 0353046 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Detection of Secondary Electrons by Scintillation Detector in Variable Pressure Scanning Electron Microscopes Author(s) Jirák, J. (CZ)
Čudek, P. (CZ)
Neděla, Vilém (UPT-D) RID, ORCID, SAINumber of authors 3 Source Title Proceedings of the 17th IFSM International Microscopy Congress. - Rio de Janeiro : Sociedade Brasileira de Microscopia e Microanilise, 2010 - ISBN 978-85-63273-06-2 Pages i10.14: 1-2 Number of pages 2 s. Action International Microscopy Congress (IMC17) /17./ Event date 19.09.2010-24.09.2010 VEvent location Rio de Janeiro Country BR - Brazil Event type WRD Language eng - English Country BR - Brazil Keywords VPSEM ; scintillation detector Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GAP102/10/1410 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20650511 - UPT-D (2005-2011) Annotation Detection of signal electrons at a higher pressure in the specimen chamber of a variable pressure scanning electron microscope (VP SEM) is commonly based on ionization and scintillation types of detectors. Detection of secondary electrons by the scintillation detector requires adding a voltage up to 10 kV to the scintillator. Secondary electrons accelerated in an electric field with this voltage acquire sufficient energy to generate photons in the scintillation material. Because of problems with electric discharges originating at higher pressures of gases in the specimen chamber of VP SEM, the scintillator of the secondary electron detector has to be positioned in a special room with a pressure up to several Pa, while pressures in the specimen chamber may reach 1 000 Pa. Such detectors where the scintillator is placed in a separately evaporated room were published by Slowko and Jacka et al. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2011
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