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Newly Designed Ionisation Secondary Electron Detector with Electrostatic Separators for VP-ESEM

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    SYSNO ASEP0353039
    Document TypeC - Proceedings Paper (int. conf.)
    R&D Document TypeConference Paper
    TitleNewly Designed Ionisation Secondary Electron Detector with Electrostatic Separators for VP-ESEM
    Author(s) Neděla, Vilém (UPT-D) RID, ORCID, SAI
    Jirák, J. (CZ)
    Number of authors2
    Source TitleProceedings of the 17th IFSM International Microscopy Congress. - Rio de Janeiro : Sociedade Brasileira de Microscopia e Microanilise, 2010 - ISBN 978-85-63273-06-2
    Pagesi10.9: 1-2
    Number of pages2 s.
    ActionInternational Microscopy Congress (IMC17) /17./
    Event date19.09.2010-24.09.2010
    VEvent locationRio de Janeiro
    CountryBR - Brazil
    Event typeWRD
    Languageeng - English
    CountryBR - Brazil
    KeywordsISEDS ; VPSEM ; ESEM
    Subject RIVJA - Electronics ; Optoelectronics, Electrical Engineering
    R&D ProjectsGAP102/10/1410 GA ČR - Czech Science Foundation (CSF)
    CEZAV0Z20650511 - UPT-D (2005-2011)
    AnnotationThe basic philosophy of our improved ionization SE detector with electrostatic separators (ISEDS), is to optimize the physical principles of the detection in VPSEM or ESEM in order to achieve a higher purity of the secondary electron (SE) signal with a minimum of backscattered electrons (BSEs) and primary electrons (PEs) contribution and enable detection of this signal depending on energy, eventually on spatial distribution of signal electrons emitted from a sample.
    WorkplaceInstitute of Scientific Instruments
    ContactMartina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
    Year of Publishing2011
Number of the records: 1  

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